[–] sylware 4y ago ↗ This is a great project.I am wondering which litography beam is used to develop the photomask for the state-of-the-art ASML EUV scanner: electron or laser?And what is the minimum feature size on those quartz(?) photomasks?
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[ 2.6 ms ] story [ 10.0 ms ] threadI am wondering which litography beam is used to develop the photomask for the state-of-the-art ASML EUV scanner: electron or laser?
And what is the minimum feature size on those quartz(?) photomasks?